Non-destructive IC defect localization using optical beam-based imaging

Edward I. Cole Jr.. Non-destructive IC defect localization using optical beam-based imaging. In Proceedings of the IEEE 2008 Custom Integrated Circuits Conference, CICC 2008, DoubleTree Hotel, San Jose, California, USA, September 21-24, 2008. pages 53-56, IEEE, 2008. [doi]

Abstract

Abstract is missing.