A Study on Wafer-Handling Robot with Coaxial Twin-Shaft Magnetic Fluid Seals

Ming Cong, Penglei Dai, Huili Shi. A Study on Wafer-Handling Robot with Coaxial Twin-Shaft Magnetic Fluid Seals. In Ming Xie, Youlun Xiong, Caihua Xiong, Honghai Liu, Zhencheng Hu, editors, Intelligent Robotics and Applications, Second International Conference, ICIRA 2009, Singapore, December 16-18, 2009. Proceedings. Volume 5928 of Lecture Notes in Computer Science, pages 1123-1137, Springer, 2009. [doi]

Abstract

Abstract is missing.