An automated wafer-handling system based on the integrated circuit equipments

Ming Cong, Yumin Zhou, Ying Jiang, Renke Kang, Dongming Guo. An automated wafer-handling system based on the integrated circuit equipments. In IEEE International Conference on Robotics and Biomimetics, ROBIO 2005, Shatin, N.T. China, 5-9 July 2005. pages 240-245, IEEE, 2005. [doi]

Authors

Ming Cong

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Yumin Zhou

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Ying Jiang

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Renke Kang

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Dongming Guo

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