Ming Cong, Yumin Zhou, Ying Jiang, Renke Kang, Dongming Guo. An automated wafer-handling system based on the integrated circuit equipments. In IEEE International Conference on Robotics and Biomimetics, ROBIO 2005, Shatin, N.T. China, 5-9 July 2005. pages 240-245, IEEE, 2005. [doi]
Abstract is missing.