InGaAs FinFETs 3D Sequentially Integrated on FDSOI Si CMOS with Record Perfomance

C. Convertino, C. B. Zota, Daniele Caimi, Marilyne Sousa, L. Czornomaz. InGaAs FinFETs 3D Sequentially Integrated on FDSOI Si CMOS with Record Perfomance. In 48th European Solid-State Device Research Conference, ESSDERC 2018, Dresden, Germany, September 3-6, 2018. pages 162-165, IEEE, 2018. [doi]

Abstract

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