Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application - researchr publication authors

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D. Croft, G. Shedd, Santosh Devasia. Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application. In American Control Conference, ACC 2000, Chicago, Illinois, USA, 28-30 June, 2000. pages 2123-2128, IEEE, 2000. [doi]

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