Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films - researchr publication authors

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Marquis Crose, Weiqi Zhang, Anh Tran, Panagiotis D. Christofides. Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films. Computers & Chemical Engineering, 113:184-195, 2018. [doi]

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