Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films

Marquis Crose, Weiqi Zhang, Anh Tran, Panagiotis D. Christofides. Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films. Computers & Chemical Engineering, 113:184-195, 2018. [doi]

@article{CroseZTC18,
  title = {Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films},
  author = {Marquis Crose and Weiqi Zhang and Anh Tran and Panagiotis D. Christofides},
  year = {2018},
  doi = {10.1016/j.compchemeng.2018.03.011},
  url = {https://doi.org/10.1016/j.compchemeng.2018.03.011},
  researchr = {https://researchr.org/publication/CroseZTC18},
  cites = {0},
  citedby = {0},
  journal = {Computers & Chemical Engineering},
  volume = {113},
  pages = {184-195},
}