A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope With Off-Plane Coupling Suppression Silicon Gratings

Jian Cui, Qiancheng Zhao. A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope With Off-Plane Coupling Suppression Silicon Gratings. IEEE Transactions on Industrial Electronics, 69(11):11765-11773, 2022. [doi]

Authors

Jian Cui

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Qiancheng Zhao

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