Jian Cui, Qiancheng Zhao. A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope With Off-Plane Coupling Suppression Silicon Gratings. IEEE Transactions on Industrial Electronics, 69(11):11765-11773, 2022. [doi]
@article{CuiZ22-0,
title = {A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope With Off-Plane Coupling Suppression Silicon Gratings},
author = {Jian Cui and Qiancheng Zhao},
year = {2022},
doi = {10.1109/TIE.2021.3127036},
url = {https://doi.org/10.1109/TIE.2021.3127036},
researchr = {https://researchr.org/publication/CuiZ22-0},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Industrial Electronics},
volume = {69},
number = {11},
pages = {11765-11773},
}