Multiscale Modeling Study of Native Oxide Growth on a Si(100) Surface - researchr publication authors

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L. Cvitkovich, Markus Jech, D. Waldhör, Al-Moatasem El-Sayed, C. Wilhelmer, Tibor Grasser. Multiscale Modeling Study of Native Oxide Growth on a Si(100) Surface. In 51st IEEE European Solid-State Device Research Conference, ESSDERC 2021, Grenoble, France, September 13-22, 2021. pages 235-238, IEEE, 2021. [doi]

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