L. Cvitkovich, Markus Jech, D. Waldhör, Al-Moatasem El-Sayed, C. Wilhelmer, Tibor Grasser. Multiscale Modeling Study of Native Oxide Growth on a Si(100) Surface. In 51st IEEE European Solid-State Device Research Conference, ESSDERC 2021, Grenoble, France, September 13-22, 2021. pages 235-238, IEEE, 2021. [doi]
Abstract is missing.