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A high-bandwidth closed-loop MEMS force sensor with system dynamics adjustment

Diyako Dadkhah, S. O. Reza Moheimani. A high-bandwidth closed-loop MEMS force sensor with system dynamics adjustment. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2023, Seattle, WA, USA, June 28-30, 2023. pages 79-84, IEEE, 2023. [doi]

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Diyako Dadkhah

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S. O. Reza Moheimani

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