Diyako Dadkhah, S. O. Reza Moheimani. A high-bandwidth closed-loop MEMS force sensor with system dynamics adjustment. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2023, Seattle, WA, USA, June 28-30, 2023. pages 79-84, IEEE, 2023. [doi]
Abstract is missing.