Modeling and fabrication of a microelectromechanical microwave switch

Ching-Liang Dai, Heng-Ming Hsu, Ming-Chang Tsai, Ming-Ming Hsieh, Ming-Wei Chang. Modeling and fabrication of a microelectromechanical microwave switch. Microelectronics Journal, 38(4-5):519-524, 2007. [doi]

Abstract

Abstract is missing.