Microelectromechanical resonator manufactured using CMOS-MEMS technique

Ching-Liang Dai, Cheng-Hsiung Kuo, Ming-Chao Chiang. Microelectromechanical resonator manufactured using CMOS-MEMS technique. Microelectronics Journal, 38(6-7):672-677, 2007. [doi]

Abstract

Abstract is missing.