Design of a 2-axis MEMS accelerometer

Jean Marie Darmanin, Ivan Grech, Edward Gatt, Owen Casha. Design of a 2-axis MEMS accelerometer. In 18th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2011, Beirut, Lebanon, December 11-14, 2011. pages 268-271, IEEE, 2011. [doi]

Authors

Jean Marie Darmanin

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Ivan Grech

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Edward Gatt

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Owen Casha

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