Anosh Daruwalla, Haoran Wen, Chang-Shun Liu, Hoon Jeong, Farrokh Ayazi. A piezo-capacitive BAW accelerometer with extended dynamic range using a gap-changing moving electrode. In IEEE/ION Position, Location and Navigation Symposium, PLANS 2018, Monterey, CA, USA, April 23-26, 2018. pages 283-287, IEEE, 2018. [doi]
Abstract is missing.