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Electrical Noise in MEMS Capacitive Elements Resulting From Environmental Mechanical Vibrations in Harsh Environments

Robert Neal Dean, Abby Anderson, Stanley J. Reeves, George T. Flowers, Alan Scottedward Hodel. Electrical Noise in MEMS Capacitive Elements Resulting From Environmental Mechanical Vibrations in Harsh Environments. IEEE Transactions on Industrial Electronics, 58(7):2697-2705, 2011. [doi]

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