Electrical characterization of HfO::2:: films obtained by UV assisted injection MOCVD

J. M. Decams, H. Guillon, C. Jiménez, M. Audier, J. P. Sénateur, C. Dubourdieu, O. Cadix, B. J. O Sullivan, M. Modreanu, P. K. Hurley. Electrical characterization of HfO::2:: films obtained by UV assisted injection MOCVD. Microelectronics Reliability, 45(5-6):929-932, 2005. [doi]

Abstract

Abstract is missing.