Micromachined microphone with optical interferometric readout

F. L. Degertekin, N. A. Hall. Micromachined microphone with optical interferometric readout. In International Symposium on Circuits and Systems (ISCAS 2001), 6-9 May 2001, Sydney, Australia. pages 177-180, IEEE, 2001. [doi]

Authors

F. L. Degertekin

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N. A. Hall

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