Micromachined microphone with optical interferometric readout

F. L. Degertekin, N. A. Hall. Micromachined microphone with optical interferometric readout. In International Symposium on Circuits and Systems (ISCAS 2001), 6-9 May 2001, Sydney, Australia. pages 177-180, IEEE, 2001. [doi]

Abstract

Abstract is missing.