F. L. Degertekin, N. A. Hall. Micromachined microphone with optical interferometric readout. In International Symposium on Circuits and Systems (ISCAS 2001), 6-9 May 2001, Sydney, Australia. pages 177-180, IEEE, 2001. [doi]
@inproceedings{DegertekinH01,
title = {Micromachined microphone with optical interferometric readout},
author = {F. L. Degertekin and N. A. Hall},
year = {2001},
doi = {10.1109/ISCAS.2001.921275},
url = {http://doi.ieeecomputersociety.org/10.1109/ISCAS.2001.921275},
researchr = {https://researchr.org/publication/DegertekinH01},
cites = {0},
citedby = {0},
pages = {177-180},
booktitle = {International Symposium on Circuits and Systems (ISCAS 2001), 6-9 May 2001, Sydney, Australia},
publisher = {IEEE},
isbn = {0-7803-6685-9},
}