16.5 A NEMS-array control IC for sub-attogram gravimetric sensing applications in 28nm CMOS technology

Nicolas Delorme, Christophe Le Blanc, Alessandro Dezzani, Mickael Bely, Alexandre Ferret, Simon Laminette, Jerome Roudier, Éric Colinet. 16.5 A NEMS-array control IC for sub-attogram gravimetric sensing applications in 28nm CMOS technology. In 2015 IEEE International Solid-State Circuits Conference, ISSCC 2015, Digest of Technical Papers, San Francisco, CA, USA, February 22-26, 2015. pages 1-3, IEEE, 2015. [doi]

Abstract

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