Lingfei Deng, Vinay Kundur, Naveen Sai Jangala Naga, Muhlis Kenan Ozel, Ender Yilmaz, Sule Ozev, Bertan Bakkaloglu, Sayfe Kiaei, Divya Pratab, Tehmoor Dar. Electrical calibration of spring-mass MEMS capacitive accelerometers. In Enrico Macii, editor, Design, Automation and Test in Europe, DATE 13, Grenoble, France, March 18-22, 2013. pages 571-574, EDA Consortium San Jose, CA, USA / ACM DL, 2013. [doi]
Abstract is missing.