Coupling-aware Dummy Metal Insertion for Lithography

Liang Deng, Martin D. F. Wong, Kai-Yuan Chao, Hua Xiang. Coupling-aware Dummy Metal Insertion for Lithography. In Proceedings of the 12th Conference on Asia South Pacific Design Automation, ASP-DAC 2007, Yokohama, Japan, January 23-26, 2007. pages 13-18, IEEE, 2007. [doi]

Abstract

Abstract is missing.