Design Of Ion-implanted MOSFET's with Very Small Physical Dimensions

Robert H. Dennard, Fritz H. Gaensslen, Hwa Nien Yu, V. Leo Rideout, Ernest Bassous, Andre R. Leblanc. Design Of Ion-implanted MOSFET's with Very Small Physical Dimensions. Proceedings of the IEEE, 87(4):668-678, 1999. [doi]

Abstract

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