John Ojur Dennis, Almur Abdelkreem Saeed Rabih, Mohd Haris M. Khir, Abdelaziz Yousif Ahmed, Mawahib Gafare Abdalrahman Ahmed, Muhammad Umer Mian. Characterization of embedded microheater of a CMOS-MEMS gravimetric sensor device. Microelectronics Journal, 55:179-188, 2016. [doi]
Abstract is missing.