Potential remedies for the V::T::/V::fb::-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey

W. Deweerd, V. Kaushik, J. Chen, Y. Shimamoto, T. Schram, L.-Å. Ragnarsson, A. Delabie, L. Pantisano, B. Eyckens, J. W. Maes. Potential remedies for the V::T::/V::fb::-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey. Microelectronics Reliability, 45(5-6):786-789, 2005. [doi]

Authors

W. Deweerd

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V. Kaushik

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J. Chen

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Y. Shimamoto

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T. Schram

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L.-Å. Ragnarsson

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A. Delabie

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L. Pantisano

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B. Eyckens

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J. W. Maes

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