Zohir Dibi, Ali Boukabache, Patrick Pons. Effect of the membrane flatness defect on the offset voltage of a silicon piezoresistive pressure sensor. In Proceedings of the 2003 10th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2003, Sharjah, United Arab Emirates, December 14-17, 2003. pages 902-905, IEEE, 2003. [doi]
Abstract is missing.