Development of a Low Resistance Micro Electro Magnetic Distance Sensor Using High Aspect Ratio Photo Resist

Xianhe Ding, Katsutoshi Kuribayashi, Takao Hashida. Development of a Low Resistance Micro Electro Magnetic Distance Sensor Using High Aspect Ratio Photo Resist. JRM, 12(5):552-558, 2000. [doi]

Abstract

Abstract is missing.