Mechanism for convex corner undercutting of (110) silicon in KOH - researchr publication authors

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Wei Dong, Xindong Zhang, Caixia Liu, Ming Li, Baokun Xu, Weiyou Chen. Mechanism for convex corner undercutting of (110) silicon in KOH. Microelectronics Journal, 35(5):417-419, 2004. [doi]

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