Wei Dong, Xindong Zhang, Caixia Liu, Ming Li, Baokun Xu, Weiyou Chen. Mechanism for convex corner undercutting of (110) silicon in KOH. Microelectronics Journal, 35(5):417-419, 2004. [doi]
@article{DongZLLXC04,
title = {Mechanism for convex corner undercutting of (110) silicon in KOH},
author = {Wei Dong and Xindong Zhang and Caixia Liu and Ming Li and Baokun Xu and Weiyou Chen},
year = {2004},
doi = {10.1016/j.mejo.2004.01.005},
url = {http://dx.doi.org/10.1016/j.mejo.2004.01.005},
researchr = {https://researchr.org/publication/DongZLLXC04},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {35},
number = {5},
pages = {417-419},
}