A 430- μ A 68.2-dB-SNR 133-dBSPL-AOP CMOS-MEMS Digital Microphone Based on Electrostatic Force Feedback Control

Jiaqi Dong, Qi Zhang, Xinwen Zhang, Yekan Chen, Yili Shen, Bo Zhao 0003, Yuxuan Luo. A 430- μ A 68.2-dB-SNR 133-dBSPL-AOP CMOS-MEMS Digital Microphone Based on Electrostatic Force Feedback Control. J. Solid-State Circuits, 60(4):1199-1209, April 2025. [doi]

Abstract

Abstract is missing.