Characterization of interface state density of three-dimensional Si nanostructure by charge pumping measurement

Chunmeng Dou, Tomoya Shoji, Kazuhiro Nakajima, Kuniyuki Kakushima, Parhat Ahmet, Yoshinori Kataoka, Akira Nishiyama, Nobuyuki Sugii, Hitoshi Wakabayashi, Kazuo Tsutsui, Kenji Natori, Hiroshi Iwai. Characterization of interface state density of three-dimensional Si nanostructure by charge pumping measurement. Microelectronics Reliability, 54(4):725-729, 2014. [doi]

Abstract

Abstract is missing.