M. Dresscher, Bayu Jayawardhana, J. J. Barradas Berglind, Jacquelien M. A. Scherpen. A modeling framework and flux controller for free molecular flow deposition processes. In 2017 American Control Conference, ACC 2017, Seattle, WA, USA, May 24-26, 2017. pages 2164-2170, IEEE, 2017. [doi]
Abstract is missing.