Predicting variability in nanoscale lithography processes

Dragoljub Gagi Drmanac, Frank Liu, Li-C. Wang. Predicting variability in nanoscale lithography processes. In Proceedings of the 46th Design Automation Conference, DAC 2009, San Francisco, CA, USA, July 26-31, 2009. pages 545-550, ACM, 2009. [doi]

Authors

Dragoljub Gagi Drmanac

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Frank Liu

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Li-C. Wang

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