3D microelectronic with BEOL compatible devices

D. Drouin, M. A.-Bounouar, G. Droulers, M. Labalette, M. Pioro-Ladriere, A. Souifi, S. Ecoffey. 3D microelectronic with BEOL compatible devices. In 33rd IEEE VLSI Test Symposium, VTS 2015, Napa, CA, USA, April 27-29, 2015. pages 1, IEEE, 2015. [doi]

Abstract

Abstract is missing.