Yuelin Du, Daifeng Guo, Martin D. F. Wong, He Yi, H.-S. Philip Wong, Hongbo Zhang, Qiang Ma 0002. Block copolymer directed self-assembly (DSA) aware contact layer optimization for 10 nm 1D standard cell library. In Jörg Henkel, editor, The IEEE/ACM International Conference on Computer-Aided Design, ICCAD'13, San Jose, CA, USA, November 18-21, 2013. pages 186-193, IEEE/ACM, 2013. [doi]
Abstract is missing.