Electrically-induced thermal stimuli for MEMS testing

Norbert Dumas, Florence Azaïs, Laurent Latorre, Pascal Nouet. Electrically-induced thermal stimuli for MEMS testing. In 9th European Test Symposium (ETS 2004), May 23-26, 2004, Ajaccio, France. pages 60-65, IEEE, 2004. [doi]

Authors

Norbert Dumas

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Florence Azaïs

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Laurent Latorre

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Pascal Nouet

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