Electrically-induced thermal stimuli for MEMS testing

Norbert Dumas, Florence Azaïs, Laurent Latorre, Pascal Nouet. Electrically-induced thermal stimuli for MEMS testing. In 9th European Test Symposium (ETS 2004), May 23-26, 2004, Ajaccio, France. pages 60-65, IEEE, 2004. [doi]

Abstract

Abstract is missing.