Multiscale modeling of atomic layer deposition processes

Vivek Dwivedi, Raymond A. Adomaitis. Multiscale modeling of atomic layer deposition processes. In American Control Conference, ACC 2009. St. Louis, Missouri, USA, June 10-12, 2009. pages 2495-2500, IEEE, 2009. [doi]

Authors

Vivek Dwivedi

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Raymond A. Adomaitis

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