Vivek Dwivedi, Raymond A. Adomaitis. Multiscale modeling of atomic layer deposition processes. In American Control Conference, ACC 2009. St. Louis, Missouri, USA, June 10-12, 2009. pages 2495-2500, IEEE, 2009. [doi]
@inproceedings{DwivediA09,
title = {Multiscale modeling of atomic layer deposition processes},
author = {Vivek Dwivedi and Raymond A. Adomaitis},
year = {2009},
doi = {10.1109/ACC.2009.5160582},
url = {https://doi.org/10.1109/ACC.2009.5160582},
researchr = {https://researchr.org/publication/DwivediA09},
cites = {0},
citedby = {0},
pages = {2495-2500},
booktitle = {American Control Conference, ACC 2009. St. Louis, Missouri, USA, June 10-12, 2009},
publisher = {IEEE},
isbn = {978-1-4244-4524-0},
}