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Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities

Thomas F. Edgar, Stephanie W. Butler, W. Jarrett Campbell, Carlos Pfeiffer, Christopher A. Bode, Sung Bo Hwang, K. S. Balakrishnan, Juergen Hahn. Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. Automatica, 36(11):1567-1603, 2000. [doi]

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Thomas F. Edgar

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Stephanie W. Butler

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W. Jarrett Campbell

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Carlos Pfeiffer

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Christopher A. Bode

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Sung Bo Hwang

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K. S. Balakrishnan

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Juergen Hahn

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