Thomas F. Edgar, Stephanie W. Butler, W. Jarrett Campbell, Carlos Pfeiffer, Christopher A. Bode, Sung Bo Hwang, K. S. Balakrishnan, Juergen Hahn. Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. Automatica, 36(11):1567-1603, 2000. [doi]
Abstract is missing.