Thomas F. Edgar, Stephanie W. Butler, W. Jarrett Campbell, Carlos Pfeiffer, Christopher A. Bode, Sung Bo Hwang, K. S. Balakrishnan, Juergen Hahn. Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. Automatica, 36(11):1567-1603, 2000. [doi]
@article{EdgarBCPBHBH00,
title = {Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities},
author = {Thomas F. Edgar and Stephanie W. Butler and W. Jarrett Campbell and Carlos Pfeiffer and Christopher A. Bode and Sung Bo Hwang and K. S. Balakrishnan and Juergen Hahn},
year = {2000},
doi = {10.1016/S0005-1098(00)00084-4},
url = {http://dx.doi.org/10.1016/S0005-1098(00)00084-4},
researchr = {https://researchr.org/publication/EdgarBCPBHBH00},
cites = {0},
citedby = {0},
journal = {Automatica},
volume = {36},
number = {11},
pages = {1567-1603},
}