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Slotted multi-step RF MEMS-CMOS parallel plate variable capacitor

Neda Emami, Maher Bakri-Kassem. Slotted multi-step RF MEMS-CMOS parallel plate variable capacitor. In IEEE 59th International Midwest Symposium on Circuits and Systems, MWSCAS 2016, Abu Dhabi, United Arab Emirates, October 16-19, 2016. pages 1-4, IEEE, 2016. [doi]

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Neda Emami

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Maher Bakri-Kassem

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