Koji Eriguchi, Yoshinori Takao, Kouichi Ono. A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering. In 2014 IEEE International Conference on IC Design & Technology, ICICDT 2014, Austin, TX, USA, May 28-30, 2014. pages 1-5, IEEE, 2014. [doi]
Abstract is missing.