High performance NEMS devices for sensing applications

Thomas Ernst, Sebastien Hentz, Julien Arcamone, Vincent Agache, Laurent Duraffourg, Issam Ouerghi, Willy Ludurczak, Carine Ladner, Eric Ollier, Philippe Andreucci, Éric Colinet, Pierre Puget. High performance NEMS devices for sensing applications. In 45th European Solid State Device Research Conference, ESSDERC 2015, Graz, Austria, September 14-18, 2015. pages 31-35, IEEE, 2015. [doi]

Abstract

Abstract is missing.