Aniello Esposito, Mauro Ciappa, Wolfgang Fichtner. Synthesis of scanning electron microscopy images by high performance computing for the metrology of advanced CMOS processes. Microelectronics Reliability, 51(9-11):1673-1678, 2011. [doi]
@article{EspositoCF11, title = {Synthesis of scanning electron microscopy images by high performance computing for the metrology of advanced CMOS processes}, author = {Aniello Esposito and Mauro Ciappa and Wolfgang Fichtner}, year = {2011}, doi = {10.1016/j.microrel.2011.07.015}, url = {http://dx.doi.org/10.1016/j.microrel.2011.07.015}, researchr = {https://researchr.org/publication/EspositoCF11}, cites = {0}, citedby = {0}, journal = {Microelectronics Reliability}, volume = {51}, number = {9-11}, pages = {1673-1678}, }